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US 8,075,298 B2Granted
Flexible nano-imprint stamp
AssigneeNIL Technology ApS
InventorsTheodor Nielsen, Anders Kristensen, Ole Hansen
Life of this patent
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AssigneeNIL Technology ApS
InventorsTheodor Nielsen, Anders Kristensen, Ole Hansen
Estimating the term…
The present invention relates to a nano-imprinting stamp for imprinting nanometer-sized to mm-sized structures, the stamp (1) having a base part and a first and a second imprinting section (2,3), the first and second imprinting sections having a lithographic pattern (7) intended for imprinting in a receiving substrate. In a first aspect, the first and the second imprinting sections (2,3) are independently displaceable in a direction substantially parallel to an imprinting direction of the imprinting stamp. In a second aspect, the first and the second imprinting sections (2,3) are mechanically weakly coupled in a direction substantially parallel to an imprinting direction of the imprinting stamp. The stamp limits the effect of imperfections in or on the substrate to be imprinted with a lithographic pattern (7) and imperfections in or on the stamp and any combinations of such imperfections by localising the bending of the stamp to the base part (5) in-between the imprinting sections (2,3).
A nano-imprinting stamp, comprising a first and a second imprinting section being integrated with a base part, wherein the first and the second imprinting sections are mechanically weakly coupled in a direction substantially parallel to an imprinting direction of the imprinting stamp, wherein the effective bending stiffness of the first and the second imprinting sections is substantially larger than the effective bending stiffness of the base part in a direction substantially parallel to an imprinting direction of the imprinting stamp, wherein the base part comprises a membrane that connects the first and the second imprinting sections.
A method for imprinting a lithographic pattern in a receiving substrate utilising a nano-imprinting stamp comprising a first and a second imprinting section being integrated with a base part, wherein the first and the second imprinting sections are mechanically weakly coupled in a direction substantially parallel to an imprinting direction of the imprinting stamp, wherein the effective bending stiffness of the first and the second imprinting sections is substantially larger than the effective bending stiffness of the base part in a direction substantially parallel to an imprinting direction of the imprinting stamp, wherein the base part comprises a membrane that connects the first and the second imprinting sections.
Dependencies are inferred from the claim text.