Information processing system, information processing method, and computer-readable storage medium

An information processing method in an information processing system which utilizes apparatus data recorded in a database in conformity with a data definition which can be updated as needed,

• the information processing system including a storage unit configured to store a data definition history in which a data definition version is associated with a period for which a data definition in the data definition version is used, and a data definition library configured to register a data definition version and a data definition in the data definition version in association with each other, wherein the data definition history is updated in accordance with updating of the data definition,
• the apparatus data being one of data generated by a semiconductor manufacturing apparatus and data obtained by processing the generated data, and
• the information processing method comprising the steps of:
• extracting, from the database, apparatus data which meets an extraction condition including an extraction period designated via a user interface;
• determining a data definition version of a data definition used within the extraction period by referring to the data definition history, and determining a data definition in the determined data definition version as a data definition of the apparatus data extracted in the extracting step by referring to the data definition library;
• and
• converting an expression of the apparatus data extracted in the extracting step into an expression conforming to a data definition designated via the user interface.

A computer-readable storage medium storing a program which causes an information processing system to execute a process for utilizing apparatus data recorded in a database in conformity with a data definition which can be updated as needed,

• the information processing system including a storage unit configured to store a data definition history in which a data definition version is associated with a period for which a data definition in the data definition version is used, and a data definition library configured to register a data definition version and a data definition in the data definition version in association with each other, wherein the data definition history is updated in accordance with updating of the data definition,
• the apparatus data being one of data generated by a semiconductor manufacturing apparatus and data obtained by processing the generated data, and
• the program causing the information processing system to execute a process comprising the steps of:
• extracting, from the database, apparatus data which meets an extraction condition including an extraction period designated via a user interface;
• determining a data definition version of a data definition used within the extraction period by referring to the data definition history, and determining a data definition in the determined data definition version as a data definition of the apparatus data extracted in the extracting step by referring to the data definition library;
• and
• converting an expression of the apparatus data extracted in the extracting step into an expression conforming to a data definition designated via the user interface.