System for display images and fabrication method thereof

A method of forming a system for display images, comprising forming a thin film transistor array substrate, comprising the steps:

• providing a substrate having a pixel area;
• forming a semiconductor layer overlying the substrate in the pixel area;
• patterning the semiconductor layer to form an active layer and a bottom electrode in the pixel area;
• forming a first dielectric layer overlying the active layer and the bottom electrode;
• forming a mask layer overlying the first dielectric layer above the active layer;
• partially removing the first dielectric layer to expose the bottom electrode or leave a thinner portion of the first dielectric layer on the bottom electrode;
• implanting ions into the active layer to form a source/drain region;
• forming a second dielectric layer overlying the first dielectric layer and the bottom electrode;
• forming a metal layer overlying the second dielectric layer;
• patterning the metal layer to form a gate and a top electrode above the active layer and the bottom electrode respectively.