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US 8,041,197 B2Granted
Heating apparatus, heat treatment apparatus, computer program and storage medium
AssigneeTokyo Electron Limited
InventorsShigeru Kasai, Tomohiro Suzuki
Life of this patent
Estimating the term…
Abstract
A heating apparatus for heating a target object W is provided with a plurality of heating light sources, including LED elements for applying heating light having a wavelength within a range from 360 to 520 nm to the object. Thus, a temperature of only the shallow surface of the object, such as a semiconductor wafer, is increased/reduced at a high speed in uniform temperature distribution, irrespective of the film type.
Claims21
A heating apparatus for heating a target object, comprising:
- a plurality of heating light sources including LED (Light Emitting Diode) elements each for emitting heating light toward the object, the heating light having a wavelength in a range from 360 to 520 nm;
- and
- a radiation thermometer that measures a temperature of the object, the radiation thermometer measuring a wavelength band different from a wavelength band of the light emitted from the LED elements.
A heat treatment apparatus for performing a specified heat treatment to a target object, comprising:
- an exhaustible processing chamber having an open ceiling portion;
- a mounting table provided within the processing chamber for supporting the object on an upper surface thereof;
- a light transmission window for air-tightly covering the ceiling portion of the processing chamber;
- a gas introducing unit for introducing a required gas into the processing chamber;
- and
- a heating apparatus provided above the light transmission window for emitting heating light toward the object,
- wherein the heating apparatus includes:
- a heating light source having an LED element for emitting heating light toward the object, the heating light having a wavelength in a range from 360 to 520 nm, and
- a radiation thermometer that measures a temperature of the object, the radiation thermometer measuring a wavelength band different from a wavelength band of the light beams emitted from the LED elements.
6 more elements
Dependencies are inferred from the claim text.