Pulse modifier, lithographic apparatus and device manufacturing method
AssigneeASML Netherlands B.V.
InventorHako Botma
Life of this patent
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Abstract
A pulse modifier, and associated lithographic apparatus and a method for manufacturing a device, is disclosed. The pulse modifier is configured to receive an input pulse of radiation and further configured to emit a plurality of corresponding output pulse portions of radiation, wherein the respective pulse portions are respectively mirrored about an axis transverse to the optical axis and mirrored about a point of the optical axis of the pulse portions.
Claims16
A pulse modifier configured to receive an input pulse of radiation and further configured to emit one or more corresponding output pulses of radiation, the pulse modifier comprising:
- a beam divider configured to divide the input pulse into a plurality of pulse portions;
- a plurality of delay paths configured to receive and delay the respective pulse portions;
- and
- a beam combiner configured to combine the delayed pulse portions into the one or more output pulses,
- wherein at least one delay path is arranged to mirror a portion of a cross-section of the pulse portion about a first axis transverse to the optical axis of the pulse portion and at least a further delay path is arranged to mirror a portion of a cross-section of the pulse portion about a point of the optical axis of the pulse portions.
A lithographic apparatus comprising a pulse modifier comprising:
- a beam divider configured to divide the input pulse into a plurality of pulse portions;
- a plurality of delay paths configured to receive and delay the respective pulse portions;
- and
- a beam combiner configured to combine the delayed pulse portions into the one or more output pulses,
- wherein at least one delay path is arranged to mirror a portion of a cross-section of the pulse portion about a first axis transverse to the optical axis of the pulse portion and at least a further delay path is arranged to mirror a portion of a cross-section of the pulse portion about a point of the optical axis of the pulse portions.
A method of modifying an input pulse of radiation, comprising:
- receiving an input pulse of radiation;
- dividing the input pulse into a plurality of pulse portions;
- delaying the plurality of pulse portions;
- combining the delayed pulse portions into one or more output pulses of radiation;
- mirroring a portion of a cross-section of the pulse portion about a first axis tansverse to the optical axis of the pulse portions using a delay path;
- and
- mirroring a portion of a cross-section of the pulse portion about a point of the optical axis of the pulse portions using a further delay path.
Dependencies are inferred from the claim text.