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US 8,026,573 B2Granted
Electrical fuse structure
AssigneeUnited Microelectronics Corp.
InventorsChien-Li Kuo, Yung-Chang Lin, Kuei-Sheng Wu, San-Fu Lin
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Abstract
An electrical fuse structure is disclosed. The electrical fuse structure includes a fuse element disposed on surface of a semiconductor substrate, a cathode electrically connected to one end of the fuse element, and an anode electrically connected to another end of the fuse element. Specifically, a compressive stress layer is disposed on at least a portion of the fuse element.
Claims18
An electrical fuse structure, comprising:
- a fuse element disposed on surface of a semiconductor substrate, wherein at least a portion of the fuse element comprises a compressive stress layer thereon;
- a cathode electrically connected to one end of the fuse element;
- and
- an anode electrically connected to another end of the fuse element, wherein the compressive stress layer covers the cathode or the anode.
1 more element
An electrical fuse structure, comprising:
- a semiconductor substrate having a transistor region and a fuse region;
- a transistor disposed on the semiconductor substrate of the transistor region;
- a fuse element disposed on the semiconductor substrate of the fuse region;
- a cathode and an anode electrically connected to two ends of the fuse element;
- and
- a compressive stress layer covering the transistor of the transistor region and the fuse element, the cathode, and the anode of the fuse region.
3 more elements
Dependencies are inferred from the claim text.