Adjustible resistor for use in a resistive divider circuit and method for manufacturing
AssigneeNXP B.V.
InventorAndy C. Negoi
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Abstract
A method of manufacturing a resistive divider circuit, includes providing a silicon body having a plurality of opposing pairs of intermediate taps extending therefrom. Each tap comprises a thin silicon stem supporting a relatively wider silicon platform. A silicidation protection (SIPROT) layer is deposited over the body and intermediate taps and then patterned to expose the platform. A silicidation process is performed to silicidate the platform to form a contact pad of relatively low resistivity.
Claims4
A method of manufacturing an integrated circuit comprising a resistive divider circuit, the method comprising providing a silicon body having an intermediate tap extending therefrom, the tap comprising a silicon stem supporting a relatively wider silicon platform, forming a silicidation protection layer over said silicon body and intermediate tap and patterning said silicidation protection layer such that said silicon platform is exposed, and performing a silicidation process so as to silicidate said exposed platform to form a respective contact pad with an oscillating interface and of relatively low resistivity.
A method of manufacturing an integrated circuit comprising a resistive divider circuit, the method comprising providing a silicon body having an intermediate tap extending therefrom, the tap comprising a silicon stem supporting a relatively wider silicon platform, forming a silicidation protection layer over said silicon body and intermediate tap and patterning said silicidation protection layer such that said silicon platform is exposed, and performing a silicidation process so as to silicidate said exposed platform to form a respective contact pad of relatively low resistivity, wherein the interface between the non-silicidated platform and the silicidated contact pad has a meandering configuration.
An integrated circuit comprising a resistive divider circuit having a silicon body with an intermediate tap extending therefrom, the tap comprising a silicon stem supporting a relatively wider silicon platform, wherein said platform comprises a non-silicidated portion coupled to said silicon body and a silicidated external contact portion with oscillating interface between said non-silicided and silicided portions.
Dependencies are inferred from the claim text.