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US 8,026,201 B2Granted
Stripper for coating layer
AssigneeAZ Electronic Materials USA Corp.
InventorsRuzhi Zhang, Ping-Hung Lu
Life of this patent
Estimating the term…
Abstract
The invention relates to compositions and methods of removing silicon-based anti-reflective coatings/hardmask layers.
Claims24
A stripping composition comprising:
- an organic fluoride salt;
- an organic quaternary ammonium base;
- and an organic solvent, further wherein the stripping composition is free of water and is capable of removing silicon containing coating, and further where the fluoride salt is selected from the group consisting of diquaternary ammonium difluoride salts, compounds having the formulae
- where R1 is zero to three substituents, each of which are independently alkyl, alkenyl, aryl alkanoyl, alkoxy, or nitro;
- and R2 is an alkyl group diquaternary ammonium fluoride salts of 1,4-diazabicyclo[2.2.2]octane, 1-fluoro-4-chloromethyl-1,4-diazoniabicyclo[2.2.2] octane bis(tetrafluoroborate), 1-fluoro-4-hydroxy-1,4-diazoniabicyclo [2.2.2]octane bis(tetrafluoroborate), N,N′-difluoro-2,2′-bipyridinium bis(tetrafluoroborate), ‘N—F’ reagents, ‘[N—F]+’ reagents, 2,2-difluoro-1,3-dimethylimidazolidine, diethylaminosulfur trifluoride, RaRbN—CF2—Rc, where Ra is hydrogen or alkyl and Rb and Rc are each selected from alkyl or aryl, and perfluorobutanesulfonyl fluoride, the hydrates thereof, as well as mixtures thereof.
2 more elements
A stripping composition comprising;
- a) an organic fluoride salt selected from the group consisting of diquaternary ammonium difluoride salts, compounds having the formulae
- where R1 is zero to three substituents, each of which are independently alkyl, alkenyl, aryl alkanoyl, alkoxy, or nitro;
- and R2 is an alkyl group, diquaternary ammonium fluoride salts of 1,4-diazabicyclo[2.2.2]octane, 1-fluoro-4-chloromethyl-1,4-diazoniabicylo[2.2.2] octane bis(tetrafluoroborate), 1-fluoro-4-hydroxy-1,4-diazoniabicyclo [2.2.2] octane bis(tetrafluoroborate), N,N′-difluoro-2,2′-bipyridinium bis(tetrafluoroborate), 2,2-difluoro-1,3-dimethylimidazolidine, diethylaminosulfur trifluoride, RaRbN—CF2—Rc, where Ra is hydrogen or alkyl and Rb and Rc are each selected from alkyl or aryl, and perfluorobutanesulfonyl fluoride, the hydrates thereof, as well as mixtures thereof,
- b) an organic quaternary ammonium base;
- and,
- c) a organic solvent selected from the group consisting of propylene glycol, unsubstituted or substituted pyrrolidinones, and mixtures thereof;
- further where the stripping composition is free of water and is capable of removing silicon containing coating.
4 more elements
Dependencies are inferred from the claim text.