Lithographic pellicle
AssigneeShin-Etsu Chemical Co., Ltd.
InventorYuichi Hamada
Life of this patent
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Abstract
A lithographic pellicle is provided that includes a pellicle frame, a pellicle film stretched over one end face of the pellicle frame via a pellicle film adhesive, and an exposure master plate adhesive provided on the other end face, wherein corners formed between a pellicle film adhesion face and exposure master plate adhesion face of the pellicle frame and inside and outside faces of the frame are subjected to C chamfering, and the chamfer dimension on the exposure master plate adhesion face is greater than C0.35 (mm) but no greater than C0.55 (mm).
Claims7
A lithographic pellicle comprising a pellicle frame, a pellicle film stretched over one end face of the pellicle frame via a pellicle film adhesive, and an exposure master plate adhesive provided on the other end face,
- wherein corners formed between a pellicle film adhesion face and exposure master plate adhesion face of the pellicle frame and inside and outside faces of the frame are subjected to C chamfering, and the chamfer dimension on the exposure master plate adhesion face is greater than C0.35 but no greater than C0.55,
- wherein the chamfer dimension on the exposure master plate adhesion face of the pellicle frame, on the inside of the pellicle, is at least C0.4 but no greater than C0.55, and
- wherein the chamfer dimension on the pellicle film adhesion face of the pellicle frame is at least C0.15 but no greater than C0.25.
A lithographic pellicle comprising a pellicle frame, a pellicle film stretched over one end face of the pellicle frame via a pellicle film adhesive, and an exposure master plate adhesive provided on the other end face,
- wherein corners formed between a pellicle film adhesion face and exposure master plate adhesion face of the pellicle frame and inside and outside faces of the frame are subjected to C chamfering,
- wherein the chamfer dimension on the exposure master plate adhesion face of the pellicle frame, on the inside of the pellicle, is at least C0.4 but no greater than C0.55, and
- wherein the other three chamfer dimensions on the pellicle film adhesion face of the pellicle frame and on the exposure master plate adhesion face of the pellicle frame, on the outside of the pellicle, are at least C0.15 but no greater than C0.25.
Dependencies are inferred from the claim text.