Hard coating film and target for formation thereof
AssigneeKobe Steel, Ltd.
InventorsKenji Yamamoto, German Fox-Rabinovich
Life of this patent
Estimating the term…
Abstract
A hard coating film having oxidation resistance and wear resistance superior to those of conventional coating films formed of TiAlN, TiCrAlN, TiCrAlSiBN, CrAlSiBN, NbCrAlSiBN, or the like. The hard coating film of the present invention has a component composition represented by the formula: (TiaCrbAlcMdBe)(CxN1-x), wherein 0≦a≦0.2, 0.05≦b≦0.4, 0.45≦c≦0.65, 0.005≦d≦0.05, 0≦e≦0.15, a+b+c+d+e=1, and 0≦x≦0.5; where M denotes at least one species selected from the group consisting of Ce, Pr, and Sc; variables a, b, c, d, and e indicate the atomic ratios of Ti, Cr, Al, M, and B respectively; and variable x indicates the atomic ratio of C.
Claims21
A hard coating film formed on the surface of a substrate, said hard coating film comprising a component composition represented by the formula:
- (TiaCrbAlcMdBe)(CxN1-x)
- wherein 0≦a≦0.2
- 0.25<b ≦0.4
- 0.45≦c≦0.65
- 0.005≦d≦0.05
- 0≦e≦0.15
- a+b+c+d+e=1
- 0≦x≦0.5
- where M denotes at least one species selected from the group consisting of Ce, Pr, and Sc;
- variables a, b, c, d, and e indicate the atomic ratios of Ti, Cr, Al, M, and B respectively;
- and variable x indicates the atomic ratio of C.
A hard coating film formed on the surface of a substrate, said hard coating film comprising a component composition represented by the formula:
- (TiaCrbAlcMdRfBe)(CxN1-x)
- wherein 0≦a≦0.2
- 0.25<b≦0.4
- 0.45≦c≦0.65
- 0.005≦d≦0.05
- 0.01≦f≦0.1
- 0≦e≦0.15
- a+b+c+d+e+f=1
- 0≦x≦0.5
- where M denotes at least one species selected from the group consisting of Ce, Pr, and Sc;
- R denotes at least one of Si and Y;
- variables a, b, c, d, f, and e indicate the atomic ratios of Ti, Cr, Al, M, R, and B respectively;
- and variable x indicates the atomic ratio of C.
A hard coating film formed on the surface of a substrate, said hard coating film comprising a component composition represented by the formula:
- (TiaCrbM′dSifBe)(CxN1-x)
- wherein 0.55≦a+b≦0.945
- 0.005≦d≦0.05
- 0.05≦f≦0.4
- 0≦e≦0.15
- a+b+d+e+f=1
- 0≦x≦0.5
- where M′ denotes at least one species selected from the group consisting of Ce, Pr, Sc, and Y;
- variables a, b, d, f, and e indicate the atomic ratios of Ti, Cr, M′, Si, and B respectively, either one of said variables a and b being allowable to equal zero;
- and variable x indicates the atomic ratio of C.
Dependencies are inferred from the claim text.