Heating crucible and deposition apparatus using the same

A deposition apparatus for forming a deposition film on a substrate, comprising:

• a vacuum chamber which receives the substrate;
• and
• a heating crucible which is installed opposite to the substrate and vaporizes an organic compound provided thereto, wherein the heating crucible comprises:
• a main body having a space which receives the organic compound and a nozzle through which the organic compound, vaporized, is discharged, the nozzle being defined in an upper wall of the main body;
• fixing portions suspended from an inner wall of the main body;
• an inner member supported at positions along an outer circumference thereof by the fixing portions to face the nozzle, the inner member having one or more separate openings formed therein along the outer circumference thereof and between supporting positions of the fixing portions, borders of the openings being defined by separate notches in the outer circumference and the inner wall of the main body, so as to allow for a transmittance of the vaporized organic compound therethrough, wherein the upper wall is perpendicular to a transmission direction of the organic compound when the organic compound is transmitted through each of the openings.

A method of producing an electroluminescent (EL) device having an organic compound, the method comprising:

• obtaining a substrate of the EL device;
• depositing a layer of the organic compound on the substrate using a deposition apparatus having a heating crucible including a main body which receives the organic compound, a nozzle defined in an upper wall of the main body, fixing portions suspended from an inner wall of the main body, and an inner member supported at positions along an outer circumference thereof by the fixing portions to face the nozzle, the inner member having one or more separate openings formed therein along the outer circumference thereof and between supporting positions of the fixing portions, borders of the openings being defined by separate notches in the outer circumference and the inner wall of the main body, so as to allow for a transmittance of the vaporized organic compound therethrough, wherein the upper wall is perpendicular to a transmission direction of the organic compound when the organic compound is transmitted through each of the openings;
• and
• deflecting the transmitted organic compound via the upper wall of the main body.

A deposition apparatus for forming a deposition film on a substrate, comprising:

• a vacuum chamber which receives the substrate;
• and
• a heating crucible which is installed opposite to the substrate and vaporizes an organic compound provided thereto, wherein the heating crucible comprises:
• a main body having a space therein defined by a cylindrical wall and an upper wall which receives the organic compound and a nozzle through which the organic compound, vaporized, is discharged, the nozzle being defined in the upper wall of the main body;
• fixing portions suspended from an inner wall of the main body;
• a baffle board parallel with the upper wall, having one or more separate openings formed therein, that is supported by the fixing portions at positions along an outer circumference of the baffle board between the openings, borders of the openings being defined by notches in an outer edge of the baffle board and the cylindrical wall of the main body, so as to allow for a transmittance of the vaporized organic compound therethrough, wherein the upper wall is perpendicular to a transmission direction of the organic compound when the organic compound is transmitted through the one or more openings.