Carrying system, substrate treating device, and carrying method

A carrying system comprising a carrying path where carrying objects are successively carried single carrying object by single carrying object or plural carrying objects by plural carrying objects, and a loading table having one or a plurality of loading regions in a loading surface on which said carrying objects can be loaded, and wherein

• said carrying path is laid out below said loading surface of said loading table in such a manner as to run across a space region where a floor-occupying portion of said loading table is projected in a vertical direction;
• and
• the carrying system further comprises:
• a moving unit which moves a carrying object, which is carried through said carrying path and passes through said space region, to that position where another carrying object does not interfere;
• and
• a room formed between the carrying path of an interior of the loading table and the loading surface, configured to retain the carrying objects and configured not to interfere with any of the carrying objects as the carrying objects are carried through the carrying path and as the carrying objects are loaded onto the loading surface.