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US 8,023,248 B2Granted
Electrostatic chuck
AssigneeShinko Electric Industries Co., Ltd.
InventorsHiroshi Yonekura, Koki Tamagawa
Life of this patent
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Abstract
An electrostatic chuck includes a dielectric layer 30 formed with an attraction and fix face onto which a plate member 10 is attracted and fixed, wherein the attraction and fix face of the dielectric layer 30 is formed with a plurality of projection parts 32 each with only a tip face abutting the plate member 10 formed as a flat face by grinding and formed with a coolant gas flow path 36 where a coolant gas flows is opened to the flat face of each of the projection parts 32.
Claims6
An electrostatic chuck comprising:
- a dielectric layer formed with an attraction and fix face onto which a plate member is attracted and fixed, and
- an internal electrode formed in the dielectric layer,
- wherein the attraction and fix face of the dielectric layer is formed with a plurality of projection parts each with only a tip face abutting the plate member formed as a flat face by grinding and formed with a coolant gas flow path where a coolant gas flows to the flat face of each of the projection parts.
Dependencies are inferred from the claim text.