Manufacturing aware design and design aware manufacturing of an integrated circuit

A manufacturing aware process for designing an integrated circuit (“IC”) layout, the process comprising:

• specifying a dipole lens for a first layer of the IC layout as part of an illumination configuration, wherein the dipole lens comprises two poles;
• at a computing device, defining a wiring configuration based on the illumination configuration;
• and
• using the defined wiring configuration to route the IC layout.

A manufacturing aware process for designing an integrated circuit (“IC”) layout, the process comprising:

• specifying a quadrupole lens for a first layer of the IC layout as part of an illumination configuration, wherein the quadrupole lens comprises four poles;
• at a computing device, defining a wiring configuration based on the illumination configuration;
• and
• using the defined wiring configuration to route the IC layout.

A manufacturing aware process for designing an integrated circuit (“IC”) layout, the process comprising:

• specifying an off-axis illumination configuration for the IC layout;
• at a computing device, defining a wiring configuration based on the specified illumination configuration;
• and
• using the defined wiring configuration to route the IC layout.

A non-transitory computer readable medium storing a computer program for execution by at least one processor, the computer program for designing an integrated circuit (“IC”) layout, the computer program comprising sets of instructions for:

• specifying a stepper lens for a particular layer of the IC layout as part of an illumination configuration;
• defining a wiring configuration based on the illumination configuration;
• and
• using the defined wiring configuration to route the IC layout.

A system comprising:

• at least one processor for executing sets of instructions;
• and
• a memory storing a computer program for designing an integrated circuit (“IC”) layout, the computer program comprising sets of instructions to be executed in the processor for:
• specifying an off-axis illumination configuration for the IC layout;
• defining a wiring configuration based on the specified illumination configuration;
• and
• using the defined wiring configuration to route the IC layout.