Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereon

A temperature setting apparatus for a heat processing plate for mounting and heat-processing a substrate thereon,

• said heat processing plate being divided into a plurality of regions and temperature-settable for each of the region, said apparatus comprising:
• a control unit that converts a processing result of the substrate into a temperature of the substrate to be mounted on said heat processing plate in a heat processing time, and that sets temperatures of the regions of said heat processing plate based on a result of the temperature conversion so that the temperature within the substrate is kept uniform during a heat processing period from the time when the substrate is mounted on said heat processing plate to the time when a predetermined heat processing time elapses in an actual heat processing time,
• wherein said control unit sets the temperatures of the regions of said heat processing plate so that any one or more of
• an accumulated temperature during a period when a temperature to cause a chemical reaction in a film on a substrate is exceeded in the heat processing period, and an accumulated reaction temperature obtained by multiplying reaction factors of a film on the substrate by the substrate temperature in the heat processing period and accumulating resulting temperatures, is/are kept uniform within the substrate.