System for monitoring temperature and slope of a wafer and a method thereof
AssigneeInotera Memories, Inc.
InventorsChi-Fen Chen, Jen Jui Cheng
Life of this patent
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Abstract
A method for monitoring the temperature and slope of a wafer is presented, and the steps of the method comprises: (a) providing a cooling machine, a monitoring system, a sensing module, and a wafer; (b) cooling the wafer by the cooling machine; (c) sensing all regions of the wafer by the sensing module, and detecting the temperature and slope of the wafer relative to the cooling machine; (d) if the wafer's temperature is higher than a set temperature, the monitoring system outputs a first alarm signal, if the wafer's slope is greater than a set slope, the monitoring system outputs a second alarm signal.
Claims3
A method for monitoring temperature and slope of a wafer, the steps of the method comprises:
- (a) providing (1) a cooling machine including a rotatable cooling module and a fixing module on the rotatable cooling module;
- (2) a sensing module including:
- a first sensing unit arranged in the rotatable cooling module;
- and
- a second sensing unit arranged on the fixing module;
- (3) a monitoring system;
- (b) cooling the wafer on the rotatable cooling module;
- (c) sensing the temperature and the slope of the wafer by the first sensing unit and the second sensing unit;
- (d) forming a sensor signal from the first sensing unit and the second sensing unit, and according to the sensor signal,
- (e1) outputting a first alarm signal from the monitoring system if the temperature of the wafer is higher than a set temperature established by the monitoring system;
- (e2) outputting a second alarm signal from the monitoring system if the slope of the wafer is greater than a set slope established by the monitoring system;
- and
- (e3) outputting a third alarm signal from the monitoring system if the temperature and the slope of the wafer do not conform to the set temperature and the set slope established by the monitoring system.
Dependencies are inferred from the claim text.