Methods of forming trench isolation in the fabrication of integrated circuitry and methods of fabricating integrated circuitry

A method of forming trench isolation in the fabrication of integrated circuitry, comprising:

• forming first and second isolation trenches into semiconductive material of a semiconductor substrate, the first isolation trench having a narrowest outermost cross sectional dimension within the semiconductive material which is less than that of the second isolation trench, the second isolation trench comprising a planar base surface of the semiconductive material, the semiconductive material comprising a planar outermost surface adjacent the second isolation trench;
• depositing an insulative layer to within the first and second isolation trenches effective to fill remaining volume of that portion of the first isolation trench which is received within the semiconductive material but not that portion of the second isolation trench which is received within the semiconductive material, the insulative layer comprising silicon dioxide deposited from flowing TEOS to the first and second isolation trenches and having a seam within the silicon dioxide that extends at least partially into that portion of the first isolation trench which is received within the semiconductive material, the insulative layer comprising a planar outer surface received within that portion of the second isolation trench which is received within the semiconductive material, said planar outer surface of the insulative layer being elevationally closer to the planar base surface of the semiconductive material than to the planar outermost surface of the semiconductive material adjacent the second isolation trench;
• depositing a spin-on-dielectric comprising polysilazane over the silicon dioxide deposited from flowing the TEOS within that portion of the second isolation trench which is received within the semiconductive material, but not within that portion of the first isolation trench which is received within the semiconductive material;
• the spin-on-dielectric being deposited effective to fill remaining volume of that portion of the second isolation trench which is received within the semiconductive material;
• densifying the spin-on-dielectric which is received within that portion of the second isolation trench which is received within the semiconductive material to remove the seam formed in the silicon dioxide in the first isolation trench, the densifying comprising a heat treatment in an O2 ambient followed by steam exposure and subsequent drying O2;
• and
• planarizing by removing outermost portions of the spin-on-dielectric and the silicon dioxide thereby exposing the planar outermost surface adjacent the second isolation trench and a planar outermost surface of semiconductive material adjacent the first isolation trench.

A method of forming integrated circuitry, comprising:

• forming isolation trenches within semiconductive material of a first area of circuitry of a semiconductor substrate and within semiconductive material of a second area of circuitry of the semiconductor substrate, the first circuitry area comprising a first minimum active area spacing between the isolation trenches received therein and the second circuitry area comprising a second minimum active area spacing between the isolation trenches received therein, the first minimum active area spacing being less than the second minimum active area spacing, the isolation trenches within the first circuitry area having respective narrowest outermost cross sectional dimensions within the semiconductive material which are less than that of the isolation trenches within the second circuitry area, the isolation trenches within the first circuitry area having respective largest aspect ratios of at least 25, the second isolation trench comprising a planar base surface of the semiconductive material, the semiconductive material comprising a planar outermost surface adjacent the second isolation trench;
• depositing an insulative layer to within the isolation trenches of the first circuitry area and to within the isolation trenches of the second circuitry area, the insulative layer comprising silicon dioxide deposited from flowing TEOS to the isolation trenches within the first and second circuitry areas, the insulative layer less than filling remaining volume of those portions of the isolation trenches which are received within the semiconductive material of the second circuitry area, the depositing of the insulative layer being effective to fill remaining volume of those portions of the isolation trenches which are received within the first circuitry area, the insulative layer comprising silicon dioxide deposited from flowing TEOS to the first and second isolation trenches having a seam within silicon dioxide that extends at least partially into the first isolation trench, the insulative layer comprising a planar outer surface received within that portion of the second isolation trench which is received within the semiconductive material, said planar outer surface of the insulative layer being elevationally closer to the planar base surface of the semiconductive material than to the planar outermost surface of the semiconductive material adjacent the second isolation trench;
• and
• after depositing the insulative layer, depositing a spin-on-dielectric comprising polysilazane over the silicon dioxide deposited from flowing the TEOS within those portions of the isolation trenches which are received within the first circuitry area, but not within those portions of the isolation trenches which are received within the second circuitry area;
• the spin-on-dielectric being deposited effective to fill remaining volume of those portions of the isolation trenches which are received within the second circuitry area;
• densifying the spin-on-dielectric which is received within those portions of the isolation trenches which are received within the semiconductive material in the second circuitry area and to remove the seam formed in the silicon dioxide in the first isolation trench, the densifying comprising a heat treatment in an O2 ambient followed by steam exposure and subsequent drying in O2;
• and
• planarizing by removing outermost portions of the spin-on-dielectric and the silicon dioxide thereby exposing the planar outermost surface adjacent the second isolation trench and a planar outermost surface of semiconductive material adjacent the first isolation trench.

A method of forming trench isolation in the fabrication of integrated circuitry, comprising:

• forming first and second isolation trenches into semiconductive material of a semiconductor substrate, the first isolation trench having a narrowest outermost cross sectional dimension within the semiconductive material which is less than that of the second isolation trench, the second isolation trench comprising a planar base surface of the semiconductive material, the semiconductive material comprising a planar outermost surface adjacent the second isolation trench;
• depositing an insulative layer to within the first and second isolation trenches effective to fill remaining volume of that portion of the first isolation trench which is received within the semiconductive material but not that portion of the second isolation trench which is received within the semiconductive material, an outermost portion of the insulative layer comprising silicon dioxide deposited from flowing TEOS to the first and second isolation trenches, the insulative layer comprising a planar outer surface received within that portion of the second isolation trench which is received within the semiconductive material, said planar outer surface of the insulative layer being elevationally closer to the planar base surface of the semiconductive material than to the planar outermost surface of the semiconductive material adjacent the second isolation trench;
• depositing a spin-on-dielectric in direct physical touching contact with the outermost portion of that portion of the silicon dioxide deposited from flowing the TEOS within the second isolation trench which is received within the semiconductive material, but not within that portion of the first isolation trench which is received within the semiconductive material;
• the spin-on-dielectric being deposited effective to fill remaining volume of that portion of the second isolation trench which is received within the semiconductive material;
• densifying the spin-on-dielectric which is received within that portion of the second isolation trench which is received within the semiconductive material, the densifying comprising a heat treatment in an O2 ambient followed by steam exposure and subsequent drying in O2;
• and
• planarizing by removing outermost portions of the spin-on-dielectric and the silicon dioxide thereby exposing the planar outermost surface adjacent the second isolation trench and a planar outermost surface of semiconductive material adjacent the first isolation trench.