Positive photosensitive composition and pattern forming method using the same
AssigneeFUJIFILM Corporation
InventorsKunihiko Kodama, Fumiyuki Nishiyama
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Abstract
A positive photosensitive composition comprising: (A) a compound capable of generating an acid upon irradiation with actinic rays or radiation; (B1) a resin of which solubility in an alkali developer increases under an action of an acid; and (B2) a resin that has at least one group selected from (a) an alkali-soluble group and (b) a group capable of decomposing under an action of an alkali to produce an alkali-soluble group, and the resin (B2) does not have a group capable of decomposing under an action of an acid; and a pattern forming method using the same.
Claims24
A positive photosensitive composition comprising:
- (A) a compound capable of generating an acid upon irradiation with actinic rays or radiation;
- (B1) a resin of which solubility in an alkali developer increases under an action of an acid;
- and
- (B2) a resin that has a group capable of decomposing under an action of an alkali to produce an alkali-soluble group, and the resin (B2) does not have a group capable of decomposing under an action of an acid,
- wherein the group capable of decomposing under an action of an alkali to produce an alkali-soluble group is a lactone having any one of the following structures:
- wherein each ring may have a substituent.
A positive photosensitive composition comprising:
- (A) a compound capable of generating an acid upon irradiation with actinic rays or radiation;
- (B1) a resin of which solubility in an alkali developer increases under an action of an acid;
- and
- (B2) a resin that has an alkali-soluble group selected from the group consisting of an aliphatic hydroxyl group with a carbon atom at 1- or 2-position being substituted by an electron withdrawing group, an electron withdrawing group-substituted amino group, and an electron withdrawing group-substituted methylene or methine group, and the resin (B2) does not have a group capable of decomposing under an action of an acid,
- wherein the component (B2) has an alkali-soluble group of the following structure:
Dependencies are inferred from the claim text.