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US 8,012,651 B2Granted
Mounting a pellicle to a frame
AssigneeIntel Corporation
InventorsFlorence Eschbach, Paul Zimmerman, Alexander Tregub, Fu-Chang Lo
Life of this patent
Estimating the term…
Abstract
A pellicle membrane is mounted between an outer frame and an inner frame. At least one of the frames is attached to the reticle without using conventional adhesives. The pellicle and reticle may be used in a lithography system. The pellicle allows radiation to pass through the pellicle to the reticle and may prevent particles from passing through the pellicle.
Claims16
An apparatus comprising:
- a pellicle;
- and
- a pellicle frame that defines an opening across which the pellicle is spanned, wherein the pellicle frame comprises a first frame member and a second frame member that are clamped together and hold the pellicle spanned across the opening.
Dependencies are inferred from the claim text.