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US 8,012,260 B2Granted
Apparatus and method for coating an areal substrate
AssigneeApplied Materials, Inc.
InventorsUwe Hoffmann, Jutta Trube, Dieter Haas
Life of this patent
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Abstract
An apparatus for coating an areal substrate, for example a rectangular plate comprises a vaporizer source and a distributor system for the supply of vaporized material onto the substrate. The distributor system comprises a line source, with this line source and the substrate is movable relative to one another. The apparatus serves preferably for the production of flat screens with organic light-emitting diodes.
Claims51
An apparatus for coating an areal substrate, comprising:
- a coating chamber;
- a stationary vaporizer source to produce a vapor by vaporizing materials with which the substrate is to be coated;
- a drive which linearly moves the areal substrate relative to the vaporizer source;
- a first distributor vertically disposed in the coating chamber which linearly distributes the vapor by the vaporizer source on said substrate, whereby the direction of vapor emission of said first distributor is substantially normal to the surface of the areal substrate and wherein linear distribution of the vapor takes place through several holes disposed in a substantially vertical straight line;
- a second distributor having one end disposed at least in the proximity of the vaporizer source and another end that terminates in the first distributor;
- wherein the first distributor and the second distributor are each encompassed by a sleeve, wherein the sleeves are provided with electric heating elements.
3 more elements
An apparatus comprising:
- a vaporizer source configured to produce a vapor output of vaporized material with which a substrate is to be coated, said vaporizer source comprising a front tube, a rear tube detachably connected to the front tube, a crucible to hold material to be vaporized, and a support to hold the crucible in a volume defined by an interior of the front tube and the rear tube when connected, wherein the crucible is removable from the volume when the rear tube is detached from the front tube;
- a first distributor inside a vacuum chamber of the apparatus having a plurality of holes therein that linearly distributes the vapor output by said vaporizer source;
- and
- a second distributor comprising a first end that operatively communicates with the vaporizer source and a second end that communicates with said first distributor;
- wherein the first distributor or the second distributor is encompassed by a sleeve, and wherein the sleeve is provided with an electric heating element.
2 more elements
Dependencies are inferred from the claim text.