Exposure apparatus and device manufacturing method

An exposure apparatus configured to expose a pattern of an original on a substrate through a proiection optical system, the apparatus comprising:

• a holding unit configured to hold the projection optical system;
• at least three anti-vibration mounts configured to support the holding unit;
• at least three supporting members configured to support the at least three anti-vibration mounts respectively;
• a base structure configured to support at least one of an original stage which holds the original, an illumination optical system which illuminates the original with exposure illumination light, a conveyance device which conveys the original, and a conveyance device which conveys the substrate;
• a vibration sensor configured to sense vibration of the holding unit;
• and
• a force actuator configured to generate a force decreasing the vibration of the holding unit between the base structure and the holding unit based on an output from the vibration sensor,
• wherein the at least three supporting members are independent of each other without connecting to each other, and
• wherein the base structure are independent of the supporting members without connecting to the supporting members.

A method of manufacturing a device, the method comprising:

• exposing a substrate using an exposure apparatus;
• developing the exposed substrate;
• and
• processing the developed substrate to manufacture the device,
• wherein the exposure apparatus comprises:
• a projection optical system;
• a holding unit configured to hold the projection optical system;
• at least three anti-vibration mounts configured to support the holding unit;
• and
• at least three supporting members configured to support the at least three anti-vibration mounts respectively;
• a base structure configured to support at least one of an original stage which holds the original, an illumination optical system which illuminates the original with exposure illumination light, a conveyance device which conveys the original, and a conveyance device which conveys the substrate;
• a position detector configured to detect a relative position of the holding unit with respect to the base structure;
• and
• a controller configured to control at least one of a distance between the base structure and the holding unit and an angle of tilt of the holding unit based on an output from the position detector,
• the at least three supporting members being independent of each other without connecting to each other,
• the base structure being independent of the supporting members without connecting to the supporting members.

A method of manufacturing a device, the method comprising:

• exposing a substrate using an exposure apparatus;
• developing the exposed substrate;
• and
• processing the developed substrate to manufacture the device,
• wherein the exposure apparatus comprises:
• a projection optical system;
• a holding unit configured to hold the projection optical system;
• at least three anti-vibration mounts configured to support the holding unit;
• at least three supporting members configured to support the at least three anti-vibration mounts respectively;
• a base structure configured to support at least one of an original stage which holds the original, an illumination optical system which illuminates the original with exposure illumination light, a conveyance device which conveys the original, and a conveyance device which conveys the substrate;
• a vibration sensor configured to sense vibration of the holding unit;
• and
• a force actuator configured to generate a force decreasing the vibration of the holding unit between the base structure and the holding unit based on an output from the vibration sensor,
• the at least three supporting members being independent of each other without connecting to each other,
• the base structure being independent of the supporting members without connecting to the supporting members.