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US 8,007,980 B2Granted
Resist for printing and patterning method using the same
AssigneeLG Display Co., Ltd.
InventorJin Wuk Kim
Life of this patent
Estimating the term…
Abstract
A resist for printing that is coated on a printing roll and is then sequentially transcribed on a printing plate and a substrate including: a material wherein a cohesive energy between the resist and the printing plate is larger than a cohesive energy between the resist and a blanket formed on the surface of printing roll, and wherein a cohesive energy between the resist and the substrate is larger than the cohesive energy between the resist and the blanket formed on the surface of printing roll.
Claims19
A resist for printing that is coated on a printing roll and is then sequentially transcribed on a printing plate and a substrate comprising:
- a material wherein a cohesive energy between the resist and the printing plate is larger than a cohesive energy between the resist and a blanket formed on the surface of printing roll, and
- wherein a cohesive energy between the resist and the substrate is larger than the cohesive energy between the resist and the blanket formed on the surface of printing roll,
- wherein the resist for printing is mixed with a solvent including any one among perfluorotributylamine, nitromethane, dimethysulfoxide, ethylene glycol, glycerol, and water when coating the printing roll with the resist, and
- wherein the solvent vaporizes as soon as the resist for printing mixed with the solvent is coated on the blanket and a surface energy of mixture of the resist and the solvent is similar to or slightly smaller than a surface energy of the blanket;
- wherein a total cohesive energy of the resist with the printing plate and blanket is greater than a total fracture energy required for fracturing the resist coated on the blanket;
- and
- wherein a first value obtained by subtracting the cohesive energy between the resist and the blanket from the cohesive energy between the resist and the printing plate and multiplying the subtraction result and a distance of a protrusion formed on the printing plate together is greater than a second value obtained by multiplying a fracture energy of the resist and a thickness of the resist coated on the blanket together.
4 more elements
A patterning method comprising:
- forming a pattern material layer on a substrate;
- coating a printing roll having a blanket adhered thereto with a resist for printing mixed with a solvent, wherein the solvent vaporizes as soon as the resist for printing mixed with the solvent is coated on the blanket and a surface energy of mixture of the resist and the solvent is similar to or slightly smaller than a surface energy of the blanket;
- transcribing some of the resist on a printing plate by rolling the printing roll on the printing plate;
- transcribing the remaining resist of printing roll on a substrate by rolling the printing roll on the substrate including the pattern material layer;
- etching the pattern material layer;
- and
- removing the resist for printing from the substrate,
- wherein the resist for printing includes a material wherein a cohesive energy between the resist and the printing plate is larger than a cohesive energy between the resist and a blanket formed on the surface of printing roll and wherein a cohesive energy between the resist and the substrate is larger than the cohesive energy between the resist and the blanket formed on the surface of printing roll, and
- wherein the solvent including any one among perfluorotributylamine, nitromethane, dimethysulfoxide, ethylene glycol, glycerol, and water when coating the printing roll with the resist;
- wherein a total cohesive energy of the resist with the printing plate and blanket is greater than a total fracture energy required for fracturing the resist coated on the blanket;
- and
- wherein a first value obtained by subtracting the cohesive energy between the resist and the blanket from the cohesive energy between the resist and the printing plate and multiplying the subtraction result and a distance of a protrusion formed on the printing plate together is greater than a second value obtained by multiplying a fracture energy of the resist and a thickness of the resist coated on the blanket together.
9 more elements
Dependencies are inferred from the claim text.