Substrate processing method, program, computer-readable storage medium and substrate processing system

A non-transitory computer-readable storage medium storing a computer readable instructions,

• said instructions running on a computer of a control unit for controlling a substrate processing system to cause the substrate processing system to perform a substrate processing method,
• wherein the substrate processing method is for performing patterning a plurality of times on films to be worked located in a same layer above a front surface of a substrate, said method comprising the steps of:
• performing patterning for a first time;
• measuring a dimension of a pattern formed by the patterning for the first time;
• setting a condition of patterning for a second time and subsequent times so that a difference between an actual dimension of the pattern for the first time and a target dimension of the patterning for the first time is equal to a difference between an actual dimension of a pattern for the second time and subsequent times and a target dimension of patterning for the second time;
• and
• performing the patterning for the second time and subsequent times under the set condition of patterning.