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US 8,007,649 B2Granted
Hydrophilic treatment method and wiring pattern forming method
AssigneeShinko Electric Industries Co., Ltd.
InventorNaohiro Mashino
Life of this patent
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Abstract
A plasma treatment is performed on the surface of one side of a polyimide film made of a resin. When wettability is imparted to the surface of the one side of the polyimide film, the plasma treatment is performed on the surface of the one side of the polyimide film to which sprayed water adhere.
Claims14
A hydrophilic treatment method, comprising:
- performing a plasma treatment on a molded article made of a resin,
- wherein when hydrophilicity is imparted to said molded article, the plasma treatment is performed at atmospheric pressure in an atmosphere containing a hydrophilic gas that has a hydrophilic group and which gas is selected from the group consisting of an alcohol, an organic matter having a carboxylic group, and combinations thereof.
A wiring pattern forming method comprising:
- forming a mask layer made of a resin on a metallic film formed on the entirety of a surface of one side of a resin substrate;
- subsequently performing patterning on said mask layer to thereby form groove portions each having a bottom surface, from which said metallic film is exposed, according to a wiring pattern to be formed;
- subsequently performing a plasma treatment on a surface of one side of said resin substrate, in which said groove portions are formed, at atmospheric pressure in an atmosphere containing a hydrophilic gas that has a hydrophilic group and which gas is selected from the group consisting of an alcohol, an organic matter having a carboxylic group, and combinations thereof;
- and
- subsequently performing electrolytic plating using said metallic film an electric power supplying layer so that said groove portions are filled with metal to thereby form a wiring pattern.
2 more elements
A hydrophilic treatment method, comprising:
- providing a molded article made of a resin;
- performing a corona discharge treatment on the molded article;
- after performing the corona discharge treatment, performing a plasma treatment on the molded article to impart hydrophilicity;
- wherein when hydrophilicity is imparted to said molded article, the plasma treatment is performed at atmospheric pressure in an atmosphere containing a hydrophilic gas that has a hydrophilic group and which gas is selected from the group consisting of an alcohol, an organic matter having a carboxylic group, and combinations thereof.
1 more element
Dependencies are inferred from the claim text.