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US 8,007,644 B2Granted
Inclined carrier transferring apparatus
AssigneeLG Display Co., Ltd.
InventorsSung Eun Kim, Tae Hyun Lim, Kwang Jong Yoo, Byung Han Yun, Yang Sik Moon
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Abstract
An inclined carrier transferring apparatus for use inline sputtering equipment. The inclined carrier transferring apparatus includes rollers and a guiding portion. The rollers transfer and support the bottom of a carrier. The guiding portion is installed diagonally with respect to the rollers, to support the top of the carrier in a non-contact manner.
Claims14
An inclined carrier transferring apparatus for use with inline sputtering equipment, comprising:
- a carrier includes a recess that supports a substrate;
- a transferable supporter for transferring and supporting a bottom of the carrier;
- and
- a guiding portion disposed such that it supports a top portion of the carrier without contacting the guiding portion,
- wherein the carrier is tilted at a predetermined angle,
- wherein the transferable supporter includes a plurality of rollers positioned at the bottom of the carrier, the guiding portion is installed diagonally with respect to the rollers,
- wherein the guiding portion includes a first magnetic end and a second magnetic end spaced a predetermined distance apart from the first magnetic end, and a third magnetic end attached to the top portion of the carrier and disposed between the first and second magnetic ends,
- wherein the second magnetic end has a stronger magnetic force than the first magnetic end,
- wherein the first magnetic end and the second magnetic end respective has different materials or different dimensions.
6 more elements
An apparatus for transferring a carrier loaded with a substrate comprising:
- a carrier includes a recess that supports a substrate;
- a transferable supporter for supporting transferably a bottom end of the carrier;
- first and second magnetic ends provided to align a top end of the carrier;
- and
- a third magnetic end positioned to interact with the first and second magnetic ends, on the top end of the carrier,
- wherein the carrier is tilted at a predetermined angle,
- wherein the transferable supporter includes a plurality of rollers positioned at the bottom of the carrier, the guiding portion is installed diagonally with respect to the rollers,
- wherein the second magnetic end has a stronger magnetic force than the first magnetic end,
- wherein the first magnetic end and the second magnetic end respective has different materials or different dimensions.
6 more elements
Dependencies are inferred from the claim text.