Cleaning apparatus

A cleaning apparatus comprising:

• a conductive sheet in contact with an adhesive sheet the adhesive sheet being configured to adhere to a portion to be cleaned of a vacuum processing apparatus;
• a pressing member configured to press the conductive sheet;
• a pressing force controlling mechanism configured to control a force for adhering the adhesive sheet to a portion to be cleaned of the vacuum processing apparatus via the pressing member;
• and
• a voltage applying mechanism configured to apply positive or negative voltage to the conductive sheet;
• wherein the pressing member has a shape similar to a surface shape of the portion to be cleaned of the vacuum processing apparatus;
• and
• wherein the adhesive surface generates an electrostatic attraction by positive or negative voltage applied to the conductive sheet by the voltage applying mechanism.

A cleaning apparatus comprising:

• an adhesive sheet including a base material and an adhesive surface for removing particles, the adhesive surface being configured to adhere to a portion to be cleaned of a vacuum processing apparatus;
• a conductive sheet in contact with the base material;
• a pressing member means for pressing the conductive sheet;
• a voltage applying mechanism means for applying positive or negative voltage to the conductive sheet;
• and
• a pressing force controlling mechanism means for controlling a force that adheres the adhesive sheet to a portion to be cleaned of a vacuum processing apparatus via the pressing member;
• wherein the pressing member means has a shape similar to a surface shape of the portion to be cleaned of the vacuum processing apparatus;
• and
• wherein the adhesive surface generates an electrostatic attraction by positive or negative voltage applied to the conductive sheet by the voltage applying mechanism means.