Heating apparatus, heating method, and computer readable storage medium

A heating apparatus for heating a substrate on which a film is coated, the apparatus comprising:

• a process chamber having a gas supply opening for supplying a first gas to the process chamber, and a gas evacuation opening for evacuating the first gas from the process chamber;
• a heating plate that is arranged in the process chamber and includes a heating element for heating the substrate;
• plural pin-like protrusions arranged on the heating plate so as to support the substrate and create a gap between the substrate and the heating plate;
• plural suction holes formed in the heating plate so as to attract by suction the substrate toward the heating plate and the protrusions;
• and
• a gas inlet adapted to supply a second gas to the gap between the heating plate and the substrate supported by the plural protrusions.