Byproduct collecting apparatus of semiconductor apparatus
AssigneeMilaebo Co., Ltd.
InventorsChe-Hoo Cho, Jung-Eui Hong, Tae-Woo Kim, In-Mun Hwang
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Abstract
Provided is a byproduct collecting apparatus for efficiently collecting reaction-byproducts contained in an exhaust gas exhausted from a process chamber during a semiconductor manufacturing process. The apparatus includes a housing and a trap module. The housing has a gas inlet port and a gas outlet port. The trap module is installed inside the housing and has first plates curved or inclined to guide an exhaust gas flow in a curved fashion.
Claims30
An apparatus for collecting reaction-byproducts contained in an exhaust gas generated at a process chamber, the apparatus comprising:
- a housing having a gas inlet port and a gas outlet port;
- and
- a trap module installed inside the housing and having first plates curved or inclined for guiding exhaust gas flow in a curved fashion, the trap module comprising:
- a first trap part in which the first plates are installed;
- and
- a second trap part in which second plates are installed, the second trap part disposed below the first trap part and the second plates disposed in a multi-step arrangement and spaced apart at predetermined intervals, the second plates having a plurality of openings provided as a passage for flowing exhaust gas.
An apparatus for collecting reaction-byproducts contained in an exhaust gas generated at a process chamber, the apparatus comprising:
- a housing having a gas inlet port and a gas outlet port;
- a first trap part provided inside the housing, wherein first plates for collecting reaction-byproducts are installed on the first trap part;
- and
- a second trap part disposed below the first trap part and provided inside the housing, wherein second plates for collecting reaction-byproducts are installed on the second trap part, wherein the first plates and the second plates are shaped to guide an exhaust gas flow in different directions;
- and
- wherein each of the first plates has an inclined shape for guiding the exhaust gas flow in a curved fashion, and each of the second plates is disposed perpendicularly to a longitudinal direction of the housing, the second plates are spaced apart with a predetermined interval to face each other, and openings are formed in the second plates such that a gas flows in zigzags.
An apparatus for collecting reaction-byproducts contained in an exhaust gas generated at a process chamber, the apparatus comprising:
- a housing having a gas inlet port;
- a gas outlet port, and an inner passage through which the exhaust gas flows;
- a cooling tower installed inside the housing, the cooling tower comprising a tube shape to divide the inner passage into an outer annular space and an inner central space;
- and
- a trap module provided inside the housing and having a plurality of plates to collect reaction-byproducts on surfaces of the plates;
- wherein the plurality of plates comprises third plates installed in the central space of the cooling tower to collect reaction-byproducts of an exhaust gas that flows through the central space.
Dependencies are inferred from the claim text.