Back to results
US 7,977,761 B2Granted
Controlled growth of a nanostructure on a substrate, and electron emission devices based on the same
AssigneeSmoltek AB
InventorMohammad Shafiqul Kabir
Life of this patent
Estimating the term…
Abstract
The present invention provides for an array of nanostructures grown on a conducting substrate. The array of nanostructures as provided herein is suitable for manufacturing electronic devices such as an electron beam writer, and a field emission device.
Claims15
An array of nanostructures supported on a conducting substrate, wherein each nanostructure in the array comprises:
- a plurality of intermediate layers between the conducting substrate and the nanostructure, wherein the plurality of intermediate layers include at least one layer that affects a morphology of the nanostructure and at least one layer to affect an electrical property of an interface between the conducting substrate and the nanostructure, wherein at least two of the plurality of intermediate layers are interdiffused, wherein material of the at least two of the plurality of intermediate layers that are interdiffused are present in the nanostructure.
Dependencies are inferred from the claim text.