High brightness X-ray metrology

A combined x-ray reflectometry and x-ray fluorescence metrology tool comprising:

• only one x-ray source, comprising,
• a liquid metal source for heating and melting two metals and producing a liquid metal jet,
• a liquid metal collector for acquiring the liquid metal jet,
• a liquid metal circulation system for returning liquid metal from the liquid metal collector to the liquid metal source, and
• an electron beam source for directing an electron beam at the liquid metal jet, thereby producing an incident x-ray beam that is directable towards a sample, the x-ray beam comprising non-Bremsstrahlung radiation concurrently having first photons at a first peak energy and a first peak wavelength and second photons at a second peak energy that is different from the first peak energy and a second peak wavelength that is different from the first peak energy,
• a grating for receiving the x-ray beam and directing the first photons along a first path and the second photons along a second path that is different from the first path,
• where the first path impinges a spot on the sample at a first grazing angle,
• where the second path impinges the spot on the sample at a second grazing angle that is different from the first grazing angle,
• a first detector for receiving first emissions from the sample in response to the first photons and producing first signals indicative of first properties of the sample,
• a second detector that is different from the first detector for receiving second emissions from the sample in response to the second photons and producing second signals indicative of second properties of the sample, and
• a controller for controlling the x-ray source, acquiring the first signals from the first detector, acquiring the second signals from the second detector, and determining the properties of the sample based at least in part on the first signals and the second signals.