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AssigneeCanon Kabushiki Kaisha
InventorsTomoyuki Miyashita, Takahiro Matsumoto, Hideki Ina
Estimating the term…
A shape measuring apparatus for measuring the shape of a measurement target surface includes an interferometer and computer. The interferometer senses interference light formed by measurement light from the measurement target surface and reference light by a photoelectric converter, while changing the light path length of the measurement light or the reference light. The computer Fourier-transforms a first interference signal sensed by the photoelectric converter to obtain a phase distribution and an amplitude distribution, shapes the amplitude distribution, inversely Fourier-transforms the phase distribution and the shaped amplitude distribution to obtain a second interference signal, and determines the shape of the measurement target surface based on the second interference signal.
An information processing apparatus that processes an interference signal obtained by sensing interference light formed by reference light and measurement light, the apparatus comprising:
A computer readable storage medium storing a program that causes a computer to process an interference signal obtained by sensing interference light formed by reference light and measurement light, the program comprising:
A measurement apparatus that senses interference light formed by reference light and measurement light and calculates a structure of a measurement target based on the sensed interference light, the apparatus comprising:
A computer readable storage medium storing a program that causes a computer to calculate a structure of a measurement target based on an interference signal obtained by sensing interference light formed by reference light and measurement light, the program comprising:
Dependencies are inferred from the claim text.