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US 7,923,811 B1Granted
Electronic fuse cell with enhanced thermal gradient
AssigneeXilinx, Inc.
InventorsHsung Jai Im, Sunhom Paak, Boon Yong Ang
Life of this patent
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Abstract
An electronic fuse (“E-fuse”) cell is formed on a semiconductor substrate. The E-fuse cell has a fuse element with a fuse link extending from a first fuse terminal across a thick dielectric structure to a second fuse terminal. The first and second fuse terminals are separated from the semiconductor substrate by a thin dielectric layer.
Claims20
An electronic fuse (“E-fuse”) cell comprising:
- a semiconductor substrate;
- a thick dielectric structure;
- a thin dielectric layer formed on the semiconductor substrate;
- a layer of link material disposed directly on the thin dielectric layer and directly on and extending over the thick dielectric structure;
- and
- a fuse element of the link material having a first fuse terminal of the link material, a second fuse terminal of the link material, and a fuse link of the link material extending from the first fuse terminal to the second fuse terminal across the thick dielectric structure, the first fuse terminal and the second fuse terminal being separated from the semiconductor substrate by the thin dielectric layer.
3 more elements
A method of fabricating an electronic fuse (“E-fuse”) cell comprising:
- providing a semiconductor wafer of a first conductivity type;
- forming a thick dielectric structure;
- forming a thin dielectric layer on the semiconductor wafer;
- depositing a silicon layer directly on the thick dielectric structure and directly on the thin dielectric layer;
- and
- patterning the silicon layer so as to define a fuse element having a first terminal, a second terminal, and a fuse link, the fuse link extending from the first terminal across the thick dielectric structure to the second terminal, the first terminal and the second terminal being separated from the semiconductor wafer by the thin dielectric layer.
3 more elements
Dependencies are inferred from the claim text.