Semiconductor device with fuse and method for fabricating the same

A method for fabricating a semiconductor with a fuse, the method comprising:

• providing a substrate;
• forming an insulation layer over the substrate;
• forming a polysilicon hard mask over the insulation layer;
• forming a first mask pattern over the polysilicon hard mask;
• forming a metal contact hole by selectively etching the insulation layer using the polysilicon hard mask after the first mask pattern is formed;
• forming a metal contact by filling a conductive material into the metal contact hole;
• and
• removing the polysilicon hard mask exposed by the first mask pattern to form a portion of the polysilicon hard mask into a polysilicon fuse.