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US 7,923,267 B2Granted
Method of measuring length of measurement object article in micro-structure
AssigneeSII NanoTechnology Inc.
InventorsMasanao Munekane, Junichi Tashiro
Life of this patent
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Abstract
A substrate comprises a substrate main body having a surface on which a measurement object article is to be formed. A reference scale is disposed on the surface of the substrate main body in the vicinity of a region of the surface where the measurement object article is to be formed. The reference scale has adjacent graduations spaced-apart a preselected distance from one another.
Claims14
A method comprising the steps of:
- providing a micro-structure comprised of a substrate having a surface on which a measurement object article is formed and having a reference scale formed on the surface in the vicinity of a region thereof where the measurement object article is formed, the reference scale having a plurality of adjacent graduations spaced-apart a preselected distance from one another;
- and
- measuring a length of the measurement object article using the reference scale by comparing the measurement object article with the plurality of graduations in the reference scale;
- wherein the measuring step further comprises the step of measuring the length of the measurement object article along a preselected direction;
- and
- wherein the providing step comprises providing the micro-structure so that the substrate is slanted relative to the preselected direction.
3 more elements
A method comprising the steps of:
- providing a micro-structure comprised of a substrate having a surface on which a measurement object article is formed and having a reference scale formed on the surface in the vicinity of a region thereof where the measurement object article is formed, the reference scale having a plurality of adjacent graduations spaced-apart a preselected distance from one another;
- and
- measuring a length of the measurement object article using the reference scale by comparing the measurement object article with the plurality of graduations in the reference scale;
- wherein the reference scale is formed by a focused ion beam (FIB) of a combined system of an FIB and a scanning electron microscope (SEM);
- wherein the measuring step comprises measuring the length of the measurement object article by irradiating an electron beam from the SEM;
- and
- wherein the providing step comprises providing the micro-structure so that the substrate is slanted relative to an irradiation direction of the electron beam irradiated from the SEM.
4 more elements
A method comprising the steps of:
- providing a micro-structure having a surface, a measurement object article formed on the surface, and a reference scale formed on the surface in the vicinity of the measurement object article, the reference scale containing a plurality of adjacent graduations spaced-apart a preselected distance from one another;
- and
- measuring a length of the measurement object article using the reference scale by comparing the measurement object article with the plurality of graduations in the reference scale while the micro-structure is slanted relative to a length direction of the measurement object article.
A method comprising the steps of:
- providing a micro-structure having a surface, a measurement object article formed on the surface, and a reference scale formed on the surface by a focused ion beam (FIB) of a combined system of an FIB and a scanning electron microscope (SEM) and in the vicinity of the measurement object article, the reference scale containing a plurality of adjacent graduations spaced-apart a preselected distance from one another;
- and
- measuring a length of the measurement object article using the reference scale by irradiating an electron beam from the SEM and comparing the measurement object article with the plurality of graduations in the reference scale while the micro-structure is slanted relative to an irradiation direction of the electron beam.
Dependencies are inferred from the claim text.