Microfluidic measuring tool to measure through-silicon via depth
AssigneeQUALCOMM Incorporated
InventorArvind Chandrasekaran
Life of this patent
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Abstract
A tool to measure the depth of one or more through-silicon vias, the tool fabricated in silicon to include a microfluidic chamber that is positioned over the one or more through-silicon vias, further including a fluid actuation chamber to inject fluid into the microfluidic chamber and into the one or more through-silicon vias, and a pressure sensing chamber to sense the fluid pressure to indicate when the one or more through-silicon vias are filled with the fluid.
Claims16
A system comprising:
- a substrate;
- a microfluidic chamber formed in the substrate and having a first opening, a second opening, and a third opening;
- a fluid actuation chamber formed in the substrate and coupled to the second opening of the microfluidic chamber to inject fluid into the microfluidic chamber;
- and
- a pressure sensing chamber formed in the substrate and coupled to the third opening of the microfluidic chamber to sense fluid pressure.
A tool comprising a substrate, the substrate comprising:
- a microfluidic chamber having an opening;
- a fluid actuation chamber coupled to the microfluidic chamber to inject fluid into the microfluidic chamber;
- and
- a pressure sensing chamber coupled to the microfluidic chamber to sense fluid pressure.
A method to measure the volume of a fluid injected into one or more vias, wherein the one or more vias are in a wafer, the method comprising:
- placing the opening of a microfluidic chamber over the one or more vias;
- injecting the fluid into the microfluidic chamber and the one or more vias;
- sensing the pressure of the fluid in the microfluidic chamber;
- and
- measuring the volume of the fluid injected into the microfluidic chamber and the one or more vias when one or more characteristics of the sensed pressure satisfy a criterion.
A system comprising:
- a substrate;
- a microfluidic chamber formed in the substrate and having a first opening, a second opening, and a third opening;
- a means for injecting fluid into the microfluidic chamber, formed in the substrate and coupled to the second opening of the microfluidic chamber;
- and
- a means for sensing pressure, formed in the substrate and coupled to the third opening of the microfluidic chamber.
Dependencies are inferred from the claim text.