High-bandwidth actuator drive for scanning probe microscopy
AssigneeBruker Nano, Inc.
InventorWilliam I. Russell
Life of this patent
Estimating the term…
Abstract
An actuator subsystem for use in a scanning probe microscope (SPM) system having a probe for measuring a sample comprises and actuator and an actuator driving circuit. The actuator operates in the SPM system to generate relative motion between the probe and the sample while the SPM system collects data indicative of a property of the sample. The relative motion includes a range of motion of at least 1 micron. The actuator driving circuit applies a drive signal to the actuator to cause the relative motion, and has a small signal bandwidth of at least 200 kHz with a phase lag of not more than 100 degrees within the small signal bandwidth.
Claims15
A scanning probe microscope (SPM) system having a probe for measuring a sample, the SPM system comprising:
- at least one position actuator that operates to generate relative motion between the probe and the sample while the SPM system collects data indicative of a property of the sample, wherein the relative motion includes a range of motion of at least 1 micron;
- an actuator driving circuit that applies a drive signal to the at least one position actuator to cause the relative motion, wherein the actuator driving circuit includes at least one amplification stage with a substantially non-reactive feedback network limiting a gain of the at least one amplification stage;
- and
- a load isolating impedance that is less than about ten ohms electrically situated between the actuator driving circuit and the at least one position actuator.
A scanning probe microscope (SPM) system having a probe for measuring a sample, the SPM system comprising:
- at least one position actuator that operates to generate relative motion between the probe and the sample while the SPM system collects data indicative of a property of the sample;
- and
- a driver circuit that has a substantially non-reactive feedback network limiting its gain, wherein the driver circuit drives the at least one position actuator with an effective output impedance of less than about 10 ohms over an operating bandwidth of the position actuator.
A scanning probe microscope (SPM) system having a probe for measuring a sample, the SPM system comprising:
- at least one position actuator that operates to generate relative motion between the probe and the sample while the SPM system collects data indicative of a property of the sample, wherein the relative motion includes a range of motion of at least 1 micron;
- an actuator driving circuit that applies a drive signal to the at least one position actuator to cause the relative motion, wherein the actuator driving circuit includes at least one amplification stage with a substantially non-reactive feedback network limiting a gain of the at least one amplification stage, and wherein the actuator driving circuit has a small signal bandwidth of at least 200 kHz with a phase lag of not more than 60 degrees within the small signal bandwidth;
- and
- a load isolating impedance that is less than about ten ohms electrically situated between the actuator driving circuit and the at least one position actuator, wherein the load isolating impedance includes:
- a first impedance network in series with an output of the actuator driving circuit, the first impedance network including a resistance in parallel with an inductance;
- and
- a second impedance network arranged across an output of the actuator driving circuit, the second impedance network including a resistance in series with a capacitance, with values of the resistance and capacitance selected such that the second impedance network maintains a reactive load on the driver circuit that is greater than a reactive load presented by the at least one position actuator.
Dependencies are inferred from the claim text.