Low overhead closed loop control system
AssigneeMKS Instruments, Inc.
InventorDavid Brian Chamberlain
Life of this patent
Estimating the term…
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AssigneeMKS Instruments, Inc.
InventorDavid Brian Chamberlain
Estimating the term…
A tool includes a chamber, a network, a sensor, a tool controller, and a pressure controller. The network carries messages to and from devices on the network. A header portion of a message indicates a sender of the message and at least one intended recipient of the message. The sensor measures a pressure within the chamber. The sensor, tool controller, and pressure controller are on the network. The pressure controller controls the pressure within the chamber in response to measurements provided by the sensor and in response to a set point provided by the tool controller. The pressure controller processes header portions of all messages carried on the network to determine the intended recipients of each message and processes at least part of data portions of both messages intended for the pressure controller and at least some messages not intended for the pressure controller.
A tool, including:
Dependencies are inferred from the claim text.