Method for creating wafer batches in an automated batch process tool

A method of batching substrates in an automated processing tool, comprising:

• selecting, from a storage area of said processing tool, a first container containing a first group of substrates;
• simultaneously transferring each substrate of said first group of substrates into a processing container in a batching station of said automated processing tool;
• determining a process recipe of said first group of substrates;
• determining if a second container in said storage area includes substrates having said process recipe;
• if said second container including substrates having said process recipe exists, either (i) when all substrates of said second container do not have said process recipe, selecting only substrates of said second container having said process recipe;
• and individually transferring only those substrates of said second container having said process recipe to said processing container to form a third group of substrates, or (ii) when all substrates of said second container have said process recipe, selecting all substrates of said second container and simultaneously transferring all substrates of said second container into said processing container to form said third group of substrates;
• and
• wherein said selecting in (i) is further based on a number of substrates in said second container and the position of each substrate within said second container and said selecting in (ii) is further based on a number of substrates in said second container and the position of each substrate within said second container.

A computer system comprising a processor, an address/data bus coupled to said processor, and a computer-readable memory unit coupled to communicate with said processor, said memory unit containing instructions that when executed by the processor implement a method of batching substrates in an automated processing tool, said method comprising the computer implemented steps of:

• selecting a first container containing a first group of substrates;
• transmitting a control signal to simultaneously transfer all substrates of said first group of substrates into a processing container in a batching station of said automated processing tool;
• selecting a second container containing a second group of substrates;
• selecting less than all substrates of said second group of substrates;
• and
• transmitting a control signal to individually transfer only selected substrates of said second group of substrates to said processing container to form a third group of substrates.

A computer system comprising a processor, an address/data bus coupled to said processor, and a computer-readable memory unit coupled to communicate with said processor, said memory unit containing instructions that when executed by the processor implement a method batching substrates in an automated processing tool, said method comprising the computer implemented steps of:

• selecting, from a storage area of said processing tool, a first container containing a first group of substrates;
• transmitting control signals to simultaneously transfer all substrates of said first group of substrates into a processing container of a batching station of said automated processing tool;
• determining a process recipe of said first group of substrates;
• determining if a second container in said storage area includes substrates having said process recipe;
• if said second container includes substrates having said process recipe exists, either (i) when all substrates of said second container do not have said process recipe, selecting only substrates of said second group of substrates having said process recipe and transmitting control signals to individually transfer only those substrates of said second container having said process recipe to said processing container to form a third group of substrates, or (ii) when all substrates of said second container have said process recipe, transmitting control signals to simultaneously transfer all substrates of said second container of substrates into said processing container to form said third group of substrates;
• and
• wherein said selecting in (i) is further based on a number of substrates in said second container and the position of each substrate within said second container and said selecting in (ii) is further based on a number of substrates in said second container and the position of each substrate within said second container.

A computer program product comprising a computer useable medium including a computer readable program therein, wherein the computer readable program when executed on a computer causes the computer to:

• select, from a storage area of a processing tool, a first container containing a first group of substrates;
• transmit control signals to said processing tool simultaneously transfer all substrates of said first group of substrates into a processing container in a batching station of said automated processing tool;
• determine a process recipe of said first group of substrates;
• determine if a second container in said storage area includes substrates having said process recipe;
• determine if a second container in said storage area includes substrates having said process recipe;
• if said second container exists, determine a number of substrates in said second container and the position of each substrate within said second container;
• and
• if said second container includes substrates having said process recipe exists, either (i) when all substrates of said second container do not have said process recipe, issuing instruction to said processing tool to select only substrates of said second group of substrates having said process recipe and to transmit control signals to individually transfer only those substrates of said second container having said process recipe to said processing container to form a third group of substrates, or (ii) when all substrates of said second container have said process recipe, issuing instructions to said processing tool to transmit control signals to simultaneously transfer all substrates of said second container of substrates into said processing container to form said third group of substrates.