Multi-fin multi-gate field effect transistor with tailored drive current
AssigneeInternational Business Machines Corporation
InventorsBrent A. Anderson, Edward J. Nowak
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AssigneeInternational Business Machines Corporation
InventorsBrent A. Anderson, Edward J. Nowak
Estimating the term…
Disclosed are embodiments of an improved multi-gated field effect transistor (MUGFET) structure and method of forming the MUGFET structure so that it exhibits a more tailored drive current. Specifically, the MUGFET incorporates multiple semiconductor fins in order to increase effective channel width of the device and, thereby, to increase the drive current of the device. Additionally, the MUGFET incorporates a gate structure having different sections with different physical dimensions relative to the semiconductor fins in order to more finely tune device drive current (i.e., to achieve a specific drive current). Optionally, the MUGFET also incorporates semiconductor fins with differing widths in order to minimize leakage current caused by increases in drive current.
A single field effect transistor comprising:
A single field effect transistor comprising:
A field effect transistor comprising:
Dependencies are inferred from the claim text.