Sub-resolutional grayscale reticle

A method for forming a sub-resolutional grayscale reticle, the method comprising:

• providing a transparent substrate;
• forming a plurality of coincident partial-light transmissive layers overlying the transparent substrate;
• and,
• forming a pattern, sub-resolutional at a first wavelength, in at least one of the transmissive layers, where the pattern is formed from at least a first thickness of the transmissive layer that is less than or equal to 100% of a transmissive layer thickness, and a second thickness of the transmissive layer, adjacent the first thickness, that is greater than 0% of the transmissive layer thickness, and where the first thickness is greater than the second thickness.

A sub-resolutional grayscale reticle comprising:

• a transparent substrate;
• a plurality of coincident partial-light transmissive layers overlying the transparent substrate, including a first transmissive layer with a first extinction coefficient and a second transmissive layer with a second extinction coefficient, different than the first extinction coefficient;
• and,
• a pattern, sub-resolutional at a first wavelength, formed in at least one of the transmissive layers, where the pattern is formed from at least a first thickness of the transmissive layer that is less than or equal to 100% of a transmissive layer thickness, and a second thickness of the transmissive layer, adjacent the first thickness, that is greater than 0% of the transmissive layer thickness, and where the first thickness is greater than the second thickness.

A sub-resolutional grayscale reticle comprising:

• a transparent substrate;
• a plurality of coincident partial-light transmissive layers overlying the transparent substrate, including a first transmissive layer and a second transmissive layer overlying the first transmissive layer;
• a first pattern, sub-resolutional at a first wavelength, formed in the first transmissive layer;
• a second pattern, sub-resolutional at the first wavelength, formed in the second transmissive layer and overlying the first pattern;
• and,
• wherein at least one of the patterns is formed from at least a first thickness of the transmissive layer that is less than or equal to 100% of a transmissive layer thickness, and a second thickness of the transmissive layer, adjacent the first thickness, that is greater than 0% of the transmissive layer thickness, and where the first thickness is greater than the second thickness.