Gas introducing mechanism and processing apparatus for processing object to be processed

A processing apparatus for providing a predetermined process to an object to be processed, comprising:

• a tubular processing vessel, which is adapted to store the object to be processed therein, and which has a side wall and a top plate;
• an exhaust means for discharging the atmosphere in the processing vessel;a table for supporting the object to be processed thereon;
• a heating means for heating the object to be processed;
• and
• a gas introducing mechanism, which is provided in the processing vessel, and which is adapted to introduce a predetermined gas into the processing vessel so as to provide a predetermined process to the object to be processed,
• wherein the gas introducing mechanism includes:
• a ring-shaped gas introducing ring member including a gas introducing port for introducing the predetermined gas from the exterior of the processing vessel, and provided at the side wall located near the top plate of the processing vessel;
• a disk-like rotary base rotatably provided below the top plate of the processing vessel;
• and
• a ring-shaped gas injection ring member provided around the rotary base, having an outer face opposed to an inner face of the gas introducing ring member, formed along the circumferential direction of the rotary base, and including a slit for injecting the gas, the slit extending through the gas injection ring member, from the outer face toward the inside,
• wherein a ring-shaped gas guide groove is provided on at least either one of the inner face of the gas introducing ring member and the outer face of the gas injection ring member, corresponding to the gas introducing port,
• wherein the rotary base is rotatably supported by a bearing having a sealing function, at a central portion of the top plate, and
• wherein the rotary base and/or gas injection ring member is supported by a side wall of the gas introducing ring member and/or the side wall of the processing vessel via a bearing.