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AssigneeApplied Materials, Inc.
InventorsStefan Hein, Peter Skuk, Karl-Heinz Wenk, Reiner Kukla, Rainer Ludwig
Estimating the term…
A guide arrangement (1) for guiding webs in evacuatable web treatment installations comprises at least one guide roller (2) with an axis (5), whose spatial position is settable. To solve the problem of compensating in modular installations with several chambers either misalignments of the chambers relative to one another and/or to avoid completely adjustable roller frames, whose adjustment would require the repositioning of treatment and coating sources and of separating gaps on the circumference of coating rollers, the invention proposes that the guide roller (2) is supported between two pivot bearings (11, 12), of which at least one is adjustable relative to the other transversely to the axis (5). This is preferably carried out thereby that the adjustable pivot bearing (12) comprises a slide guide (15), fastened to a chamber wall (14), on which a slide (16) with the pivot bearing (12) is guided, and that the adjustable pivot bearing (12) comprises a remotely operated adjustment drive (21).
A web treatment vacuum installation, comprising an arrangement of chamber modules individually evacuable by vacuum pumps, wherein for guidance of a web to be tread at least one guide roller is provided, the at least one guide roller having two ends, each comprising a rotatable journal pin, and a rotation axis of the guide roller extending through the two ends, each rotatable journal pin being supported by one of the two pivot bearings, wherein a) coating rollers for coating the web thereon are disposed in the chamber modules, and wherein b) the chambers are connected to one another through gap-shaped slots, and wherein the position of at least one of the two pivot bearings is adjustable relative to the other pivot bearing and transversely to the rotation axis of the guide roller, such that the web is guided through an adjacent slot of the gap-shaped slots without contact with an edge of the adjacent slot wherein the adjustment direction of the pivot bearing lies in the bisecting line of the arc of contact of the guide roller by the web.
A web treatment vacuum installation, comprising an arrangement of chamber modules individually evacuable by vacuum pumps, wherein for guidance of a web to be tread at least one guide roller is provided, the at least one guide roller having two ends, each comprising a rotatable journal pin, and a rotation axis of the guide roller extending through the two ends, each rotatable journal pin being supported by one of the two pivot bearings, wherein a) coating rollers for coating the web thereon are disposed in the chamber modules, and wherein b) the chambers are connected to one another through gap-shaped slots, and wherein the position of at least one of the two pivot bearings is adjustable relative to the other pivot bearing and transversely to the rotation axis of the guide roller, such that the web is guided through an adjacent slot of the gap-shaped slots without contact with an edge of the adjacent slot wherein the adjustable pivot bearing comprises a remotely operated adjustment drive and the adjustment drive is comprised of an electromotor, a step-down gear and a rotation coupling.
A web treatment vacuum installation, comprising an arrangement of chamber modules individually evacuable by vacuum pumps, wherein for guidance of a web to be tread at least one guide roller is provided, the at least one guide roller having two ends, each comprising a rotatable journal pin, and a rotation axis of the guide roller extending through the two ends, each rotatable journal pin being supported by one of the two pivot bearings, wherein a) coating rollers for coating the web thereon are disposed in the chamber modules, and wherein b) the chambers are connected to one another through gap-shaped slots, and wherein the position of at least one of the two pivot bearings is adjustable relative to the other pivot bearing and transversely to the rotation axis of the guide roller, such that the web is guided through an adjacent slot wherein the at least one adjustable pivot bearing comprises a slide guide on which is guided a slide with the pivot bearings and, wherein the portion of the slide guide not covered by the slide is covered by at least one bellows.
A web treatment vacuum installation, comprising an arrangement of chamber modules individually evacuable by vacuum pumps, wherein for guidance of a web to be treated at least one guide roller is provided, the at least one guide roller being supported between two pivot bearings, the at least one guide roller having two ends and a rotation axis of the guide roller extending through the two ends, each end being supported by one of the two pivot bearings, wherein
Dependencies are inferred from the claim text.