Electronic devices with hybrid high-k dielectric and fabrication methods thereof
AssigneeIndustrial Technology Research Institute
InventorsWei-Ling Lin, Jiing-Fa Wen, Wen-Hsi Lee, Tarng-Shiang Hu, Jiun-Jie Wang, Cheng-Chung Lee
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Abstract
Electronic devices with hybrid high-k dielectric and fabrication methods thereof. The electronic device includes a substrate. A first electrode is disposed on the substrate. Hybrid high-k multi-layers comprising a first dielectric layer and a second dielectric layer are disposed on the substrate, wherein the first dielectric layer and the second dielectric layer are solvable and substantially without interface therebetween. A second electrode is formed on the hybrid multi-layers.
Claims11
An electronic device with hybrid high-k dielectric, comprising:
- a substrate;
- a first electrode disposed on the substrate;
- a hybrid dielectric structure comprising a first part of dielectric layer and a second part of dielectric layer disposed on the substrate, wherein the first part of dielectric layer and the second part of dielectric layer are solvable with each other and substantially without an interface therebetween;
- and
- a second electrode disposed on the hybrid dielectric structure,
- wherein the first part of dielectric layer comprises a high dielectric constant (high-k) dielectric material comprising an organic/inorganic hybrid material with a combination of high-k nano-particles and a photosensitive and/or a non-photosensitive polymer matrix.
Dependencies are inferred from the claim text.