Method and device for the thermal treatment of substrates
AssigneeSTEAG HamaTech AG
InventorsWerner Saule, Lothar Berger, Christian Krauss, Robert Weihing
Life of this patent
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Abstract
This invention relates to a method and a device for the thermal treatment of substrates in which the substrates are held in contact with or a small distance away from a heating plate, which is heated by a plurality of separately controllable heating elements on the side of the heating plate facing away from the substrate, the heating plate being surrounded, at least in its plane, by a frame spaced apart therefrom, and gas being conveyed, in a controlled manner, through a gap between the frame and at least one edge of the heating plate.
Claims30
A method of thermally treating substrates, including the steps of:
- bringing a substrate into contact with, or spacing the substrate slightly from, a heating plate, wherein said heating plate is heated, on a side remote from the substrate, by a plurality of separately controllable heating elements;
- providing a frame that radially surrounds said heating plate and is spaced from said heating plate;
- conveying gas through a gap between said frame and at least one edge of said heating plate in such a way that the gas does not come into contact with the substrate;
- changing the width of the gap along at least a portion of an edge of said heating plate prior to and/or during a thermal treatment of a substrate;
- and
- controlling at least one of a quantity and a temperature of the gas in order to influence a temperature of said at least one edge of said heating plate.
A device for thermally treating substrates, comprising:
- a heating plate (4);
- means (11) for holding a substrate in contact with, or slightly spaced from, said heating plate (4);
- a plurality of separately controllable heating elements (9) disposed on a side of said heating plate (4) remote from the substrate;
- a frame (19) that radially surrounds said heating plate (4), wherein said frame (19) is spaced from said heating plate to form at least one gap (A) between said frame (19) and at least one edge of said heating plate (4);
- at least one device (34) for conveying gas through said at least one gap (A), wherein said at least one device (34) is adapted to control at least one of a quantity and a temperature of a gas conveyed through said at least one gap (A), further wherein at least one element (24) is provided for a local adjustment of a width of said at least one pap (A), and wherein said at least one element (24) is adjustably disposed on said frame (19);
- and
- means for guiding the gas such that the gas does not come into contact with the substrate.
Dependencies are inferred from the claim text.