Substrate processing apparatus and substrate processing method
AssigneeDainippon Screen Mfg. Co., Ltd.
InventorsAyumi Higuchi, Kenichiro Arai
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Abstract
In a substrate processing apparatus of the present invention, a buffer bath is provided at any point in a supplying passage of a processing solution supplying part, and a micro bubble generator is provided in the buffer bath. When a substrate is processed, large quantities of micro bubbles can be generated and stored in the buffer bath, and the micro bubbles can be supplied from the buffer bath to a processing bath. This enables the large quantities of micro bubbles to be supplied to the surrounding of the substrate, while the use of the small micro bubble generator avoids an increase in the size of the substrate processing apparatus.
Claims18
A substrate processing apparatus that performs a predetermined substrate process by using a processing solution, comprising:
- a processing bath for storing a processing solution;
- a holding part for holding a substrate in said processing bath;
- a processing solution supplying part for supplying processing solution to said processing bath;
- a buffer bath for storing processing solution at any point in a supplying passage of said processing solution supplying part;
- and
- a micro bubble generating part for generating micro bubbles in processing solution stored in said buffer bath,
- wherein, said processing solution supplying part has a first feeding passage for feeding processing solution through said buffer bath and a second feeding passage for feeding processing solution without passing through said buffer bath, so that processing solution containing micro bubbles fed from said first feeding passage can be joined with processing solution fed from said second feeding passage so as to be supplied together.
A substrate processing apparatus that performs a predetermined substrate process by using a processing solution, comprising:
- a holding part for holding a substrate;
- a processing solution supplying part for supplying processing solution to a substrate held by said holding part;
- a buffer bath for storing processing solution at any point in a supplying passage of said processing solution supplying part;
- and
- a micro bubble generating part for generating micro bubbles in processing solution stored in said buffer bath,
- wherein, said processing solution supplying part has a first feeding passage for feeding processing solution through said buffer bath and a second feeding passage for feeding processing solution without passing through said buffer bath, so that processing solution containing micro bubbles fed from said first feeding passage can be joined with processing solution fed from said second feeding passage so as to be supplied together.
Dependencies are inferred from the claim text.