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US 7,794,523 B2Granted
Method for the recovery and re-use of process gases
AssigneeLinde Aktiengesellschaft
InventorWalter H. Whitlock
Life of this patent
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Abstract
The present invention relates to methods and systems for processing an exhaust stream containing a recyclable component mixed with other components and impurities to produce a high purity product that contains all of the recyclable component. One or more waste streams containing none of the recyclable component are also produced. The present invention particularly relates to the recovery of valuable recyclable components used in the manufacture of semiconductor devices.
Claims16
A method for the recovery of process gas, comprising:
- scrubbing a gas exhaust stream containing the process gas with water in a first scrubber to obtain a first scrubbed stream;
- scrubbing the first scrubbed stream with a water containing solution in a catalyst bed in a second scrubber to obtain a second scrubbed stream;
- compressing the second scrubbed stream;
- drying the second scrubbed stream in a heat exchanger process;
- filtering the second scrubbed stream to obtain a dry compressed stream;
- further drying the dry compressed stream to obtain an ultra-dry stream;
- cooling the ultra-dry stream to obtain a liquid reflux stream enriched in the process gas and a vapor stream depleted in the process gas;
- distilling the liquid reflux stream to recover a substantially pure process gas.
5 more elements
Dependencies are inferred from the claim text.