Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems

A system for application in investigating a sample system with electromagnetic radiation, sequentially comprising:

• a. a source of a beam electromagnetic radiation;
• b. a polarizer element;
• c. optionally a compensator element;
• d. additional element(s);
• e. a sample system;
• f. additional element(s);
• g. optionally a compensator element;
• h. an Analyzer element;
• and
• i. a Detector System;
• wherein said additional component(s) in d. and f. each comprise at least one electromagnetic beam intercepting angle-of-incidence changing system element which can be easily entered into the locus of the electromagnetic beam on both sides of said sample system, which at least one electromagnetic beam intercepting angle-of-incidence changing system elements serves to direct said electromagnetic beam onto substantially the same spot on the sample system as is the case where the said at least one electromagnetic beam intercepting angle-of-incidence changing system elements are not present, but at an angle-of-incidence which is different than that when said at least one electromagnetic beam intercepting angle-of-incidence changing system is not present, said at least one electromagnetic beam intercepting angle-of-incidence changing system elements not effecting, or requiring change of, the locus of the electromagnetic beams outside said at least one electromagnetic beam intercepting angle-of-incidence changing system elements, on either side thereof, hence does not require multiple sources and detectors or change of position of at least one selection from the group consisting of:
• said source of electromagnetic radiation;
• and
• said detector thereof;
• to effect change said angle-of-incidence;
• said material system investigating system being functionally mounted to a two dimension location means for positioning said selected system at points in an two dimensional plane which is, in use, oriented substantially parallel to but offset from, the plane of a surface of said sample system;
• such that in use said selected system is located near the surface of said sample and a beam of electromagnetic radiation provided by said source means is caused to interact therewith and enter said data detector means;
• said selected system further comprising means for adjusting the location thereof at desired third dimension offset locations with respect to points in said plane of the surface of said sample;
• said selected system further comprising means for controlling the location of the source means and data detector means in said two dimension plane;
• and
• said system further comprising at least one selection from the group consisting of:
• means for effecting rotational motion of said source and detector of electromagnetic radiation about at least one axis;
• and
• means for providing introducing gas near said sample.

A system for positioning a source of a beam of electromagnetic radiation and a detector thereof in relation to a sample to be investigated comprising:

• a source and detector of electromagnetic radiation and a sample;
• said system further comprising means for effecting relative translational motion between said source and detector of electromagnetic radiation and said sample in three orthogonally related dimensions with respect to a planar or non-planar surface of said sample, which can be in any orientation in laboratory coordinates;
• said system further comprising at least one electromagnetic beam intercepting angle-of-incidence changing system comprising elements which are easily functionally entered into the locus of the electromagnetic beam on both sides of said sample system, which at least one electromagnetic beam intercepting angle-of-incidence changing system serves to direct said electromagnetic beam onto substantially the same spot on the sample system as is the case where the said at least one electromagnetic beam intercepting angle-of-incidence changing system is not functionally present, but at an angle-of-incidence which is different than that when said at least one electromagnetic beam intercepting angle-of-incidence changing system is not functionally present, said at least one electromagnetic beam intercepting angle-of-incidence changing system not effecting, or requiring change of, the locus of the electromagnetic beams outside said at least one electromagnetic beam intercepting angle-of-incidence changing system, on either side of said means for supporting a sample system, hence does not require said material system investigating system to comprise multiple sources and detectors or the change of position of at least one selection from the group consisting of:
• said source of electromagnetic radiation;
• and
• said detector thereof;
• to effect change said angle-of-incidence.

A system for positioning a source of a beam of electromagnetic radiation and a detector thereof in relation to a sample to be investigated comprising:

• a source and detector of electromagnetic radiation and a sample;
• said system further comprising means for effecting relative translational motion between said source and detector of electromagnetic radiation and said sample in three orthogonally related dimensions with respect to a planar or non-planar surface of said sample, which can be in any orientation in laboratory coordinates;
• said system further comprising means for causing relative motion between said source and detector of electromagnetic radiation as a unit, and said sample;
• said system further comprising interface means that provides means for introducing gas near said sample;
• such that in use wavelengths which are absorbed by oxygen and/or water vapor can be applied;
• said system further comprising at least one electromagnetic beam intercepting angle-of-incidence changing system comprising elements which are easily functionally entered into the locus of the electromagnetic beam on both sides of said sample system, which at least one electromagnetic beam intercepting angle-of-incidence changing system serves to direct said electromagnetic beam onto substantially the same spot on the sample system as is the case where the said at least one electromagnetic beam intercepting angle-of-incidence changing system is not functionally present, but at an angle-of-incidence which is different than that when said at least one electromagnetic beam intercepting angle-of-incidence changing system is not functionally present, said at least one electromagnetic beam intercepting angle-of-incidence changing system not effecting, or requiring change of, the locus of the electromagnetic beams outside said at least one electromagnetic beam intercepting angle-of-incidence changing system, on either side of said means for supporting a sample system, hence does not require said material system investigating system to comprise multiple sources and detectors or the change of position of at least one selection from the group consisting of:
• said source of electromagnetic radiation;
• and
• said detector thereof;
• to effect change said angle-of-incidence.

A system for positioning a source of a beam of electromagnetic radiation and a detector thereof in relation to a sample to be investigated comprising:

• a source and detector of electromagnetic radiation;
• and
• a sample;
• said system further comprising means for effecting translational motion of said source and detector of electromagnetic radiation with respect to a surface of said sample, along a translational axis;
• said source and detector of electromagnetic radiation being sequentially aligned along said translational axis;
• and
• said system further comprising means for effecting rotational motion of said source and detector of electromagnetic radiation about said translational axis.