Method of utilizing dual-layer photoresist to form black matrixes and spacers on a control circuit substrate
AssigneeHannstar Display Corp.
InventorsChih-Chieh Lan, Hung-Yi Hung, Yu-Fang Wang
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Abstract
A method of utilizing dual-layer photoresist to form black matrixes and spacers on a control circuit substrate is provided. The dual-layer photoresist includes a layer of black resin and a layer of transparent photoresist. The black resin, having an optical density greater than three, is mainly used to achieve the effect of black matrix. The transparent photoresist is mainly used to satisfy the needed cell gap between two transparent substrates.
Claims12
A method of utilizing dual-layer photoresist to form black matrixes and spacers on a control circuit substrate, the control circuit substrate having a control circuit made of control devices having a passivation layer formed thereon, and the passivation layer having contact windows to expose electrodes of the control devices respectively, comprising:
- forming a color filter layer on the control circuit substrate;
- forming pixel electrodes on the color filter layer, each pixel electrode electrically connecting to the electrode of each of the control devices through each of the contact windows;
- forming a black resin on the control circuit substrate to overlap the contact windows in the passivation layer;
- performing a first soft baking step to soft-bake the black resin;
- forming a transparent photoresist on the black resin, wherein an exposure dose of the transparent photoresist is about 19 mj/cm2;
- performing a second soft baking step to soft-bake the transparent photoresist;
- patterning the transparent photoresist and the black resin to form spacers respectively on opaque areas of the control circuit by only one photomask;
- and
- hard baking the transparent photoresist and the black resin.
The method of clam 1, wherein the control circuit comprises a thin-film-transistor array substrate.
Dependencies are inferred from the claim text.