OCB liquid crystal device with a protrusion having a concave portion at its tip, method of manufacturing liquid crystal device, electronic apparatus, and projector

A method of manufacturing a liquid crystal device which includes a pair of substrates which face each other and a liquid crystal layer interposed between the pair of substrates, and changes an alignment state of liquid crystal molecules of the liquid crystal layer from a spray alignment to a bend alignment to perform display or optical modulation, the method comprising:

• forming a switching element on one of the pair of substrates;
• forming an insulating layer on the one substrates so as to cover the switching element;
• forming a contact hole electrically connected to the switching element in a portion of the insulating layer;
• forming an electrode on the insulating layer so as to cover the inside of the contact hole;
• forming a mask layer on the electrode so as to surround the contact hole;
• forming a material film on the one substrate, on which the mask layer is formed, by a sputtering method;
• forming a protrusion having a concave portion by removing, by a lift-off method, the mask layer and a portion of the material film formed on the mask layer;
• and
• forming an alignment film to cover the surface of the protrusion including the concave portion,
• the concave portion has a predetermined diameter r and a predetermined depth d, and
• the predetermined diameter r and the predetermined depth d satisfy 1<(d/r)≦5.

A method of manufacturing a liquid crystal device which includes a pair of substrates which face each other and a liquid crystal layer interposed between the pair of substrates, and changes an alignment state of liquid crystal molecules of the liquid crystal layer from a spray alignment to a bend alignment to perform display or optical modulation, the method comprising:

• forming a switching element on one of the pair of substrates;
• forming an insulating layer on the substrates so as to cover the switching element;
• forming a contact hole electrically connected to the switching element in a portion of the insulating layer;
• forming a mask layer on the insulating layer so as to surround the contact hole;
• forming a conductive material film on the one substrate, on which the mask layer is formed, by a sputtering method;
• forming a protrusion having a concave portion by removing, by a lift-off method, the mask layer and a portion of the conductive material film formed on the mask layer and;
• forming an electrode on the insulating layer so as to cover the surface of the protrusion including the concave portion;
• and
• forming an alignment film on the surface of the one substrate along the surface of the electrode,
• the concave portion has a predetermined diameter r and a predetermined depth d, and
• the predetermined diameter r and the predetermined depth d satisfy 1<(d/r)≦5.