Temperature sensor and method for its production
OwnerHeinrich Zitzmann, Georg Bernitzinventors
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Abstract
In a method for producing a temperature sensor, there is first provided a substrate, on the first surface of which there is arranged a sensor structure having a first end and a second end, wherein the sensor structure substantially completely covers the first surface of the substrate. Then an insulation layer is at least partially formed on this sensor structure on which a first and a second contact area are then formed. The first and second contact areas are formed such that they are conductively connected to the first end and the second end of the sensor structure, respectively.
Claims18
A temperature sensor, comprising:
- a substrate;
- a sensor structure arranged on a first surface of the substrate, wherein the sensor structure includes a length of a meander-shaped resistive film having a first end and a second end;
- an insulation layer at least partially arranged on the sensor structure and the first surface of the substrate;
- a first and a second contact area arranged on the insulation layer;
- a third and a fourth contact area arranged on the first surface of the substrate and in conductive connection with the first and the second end of the resistive film, respectively, and in conductive connection with the first and the second contact area on the insulation layer, respectively, wherein the first and the second contact areas have a surface dimension at least 2 times greater than a corresponding surface dimension of the third and fourth contact areas;
- and
- wherein the length of resistive film of the sensor structure substantially completely covers the first surface of the substrate.
A method for producing a temperature sensor, comprising:
- (a) providing a substrate on the first surface of which there is arranged a sensor structure having a length of resistive film with a first end and a second end, wherein the length of resistive film of the sensor structure substantially completely covers the first surface of the substrate;
- (b) forming a third and a fourth contact area on the first surface of the substrate and in connection with the first and the second ends of the sensor structure, respectively;
- (c) forming an insulation layer at least partially on the sensor structure and the first surface of the substrate;
- and
- (d) forming a first and a second contact area on the insulation layer such that they are conductively connected to the third and fourth contact areas of the sensor structure, respectively, and wherein the first and the second contact areas have a surface dimension at least 2 times greater than a corresponding surface dimension of the third and fourth contact areas.
Dependencies are inferred from the claim text.